JPH0315543Y2 - - Google Patents
Info
- Publication number
- JPH0315543Y2 JPH0315543Y2 JP19950785U JP19950785U JPH0315543Y2 JP H0315543 Y2 JPH0315543 Y2 JP H0315543Y2 JP 19950785 U JP19950785 U JP 19950785U JP 19950785 U JP19950785 U JP 19950785U JP H0315543 Y2 JPH0315543 Y2 JP H0315543Y2
- Authority
- JP
- Japan
- Prior art keywords
- arsenic
- reaction tube
- tube
- vapor
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 22
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 229910052785 arsenic Inorganic materials 0.000 claims description 11
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 11
- LULLIKNODDLMDQ-UHFFFAOYSA-N arsenic(3+) Chemical compound [As+3] LULLIKNODDLMDQ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 7
- 238000001556 precipitation Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- COHDHYZHOPQOFD-UHFFFAOYSA-N arsenic pentoxide Chemical compound O=[As](=O)O[As](=O)=O COHDHYZHOPQOFD-UHFFFAOYSA-N 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 206010016275 Fear Diseases 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- OEYOHULQRFXULB-UHFFFAOYSA-N arsenic trichloride Chemical compound Cl[As](Cl)Cl OEYOHULQRFXULB-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62110257U JPS62110257U (en]) | 1987-07-14 |
| JPH0315543Y2 true JPH0315543Y2 (en]) | 1991-04-04 |
Family
ID=31161197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19950785U Expired JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315543Y2 (en]) |
-
1985
- 1985-12-27 JP JP19950785U patent/JPH0315543Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62110257U (en]) | 1987-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000093701A (ja) | 昇華精製方法及び装置 | |
| FR2429246A1 (fr) | Procede de fabrication de noir de carbone dit " furnace " | |
| JPH0315543Y2 (en]) | ||
| JPS6434483A (en) | Method of removing heavy metallic compound from filter dust | |
| ATE64194T1 (de) | Regenerative waermetauscher. | |
| JP2001126988A (ja) | 半導体製造装置 | |
| JP2583306B2 (ja) | 試薬の精製装置とその精製方法 | |
| JPS6038149Y2 (ja) | 無酸化連続熱処理炉 | |
| JPS62156237A (ja) | 金属砒素昇華装置 | |
| RU169600U1 (ru) | Реактор для очистки твердых веществ методом вакуумной сублимации | |
| JPH08259209A (ja) | 黒鉛部材の高純度化処理炉 | |
| JPS60118230A (ja) | 高温高真空反応装置の連結部の構造 | |
| JP2001126999A (ja) | 熱処理装置 | |
| EP0143275B1 (en) | Device for preheating of scrap in an electric arc steel furnace | |
| EP0063116B1 (en) | Apparatus for the recovery of vaporized phthalic anhydride from gas streams | |
| JPH0444314A (ja) | 半導体基板処理装置 | |
| US1284176A (en) | Sulfuric-acid manufacture. | |
| JPH0318497Y2 (en]) | ||
| JPH0225441Y2 (en]) | ||
| JP2987512B2 (ja) | Ｃｖｄ装置 | |
| RU96110861A (ru) | Способ термической обработки труб | |
| JPH045999Y2 (en]) | ||
| JPH03205818A (ja) | 気相成長装置 | |
| JPH0587971B2 (en]) | ||
| JPS5855296U (ja) | 真空熱処理炉 |